Characterization of thin films using generalized lamb wave dispersion relations
نویسندگان
چکیده
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The measurement of the dispersion curve of surface waves and the inversion of this dispersion equation relation, allow to determine the elastic constants, the density or the thickness of a thin layer on a substrate. Besides, it is possible to have qualitative information on the adhesion properties of the layer.
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